Prober Series
  Prober Option
  Purchasing/
Repairing Parts


Prober Series
 
 
Wafer Size Capacity
75mm、100mm、125mm、150mm (3 inch、4 inch、 5 inch、6 inch).
Accuracy
0.25mil(64µm)includes X&Y.
The 0,0 reference point is taught on a center die of the first wafer.
Tester Interface Packages
All major ATE manufacturers.
Networking and Tester Communications
Standard Interfaces
Hardware-RS232C, TTL(Parallel I/O).
GPIB(IEEE-488).
Protocols EG Enhanced(recommended).
Optional Interfaces
Ethernet(TCP/IP or DECNET).




Wafer Size Capacity

50mm(6in)、200mm(8in)

Wafer Handling
2001×:1 Type,25slot

Accuracy
>±0.35(±8.96um)includesX&Y
The0,0 reference point is taught on a center die of the first wafer.

Facility Requirements
Input Power/ Air/ Vacuum:
Base Unit: AC115/230V  1ψ 50/60Hz  6A/3A
Air:75psi@2.3SCFM
Vacuum:23 in HG@3.0SCFM nom.
EG2080X  AC115/230V  1ψ50/60Hz  6A/3A
Air:75psi@2.3SCFM
Vacuum:23 in HG@3.0SCF Mnom.
Note:All speciflcations are swbjeci to change without prior notificalion
Dimensions (includes PT 201 Table)

EG2080X Base Unit
45.40”(115.3cm) x 42.60” (108.2cm) x
32.00”(81.30cm) , 338.0Ibs (153.6kg)
EG2080X Fully Auto
66.33”(168.5cm) x 65.35” (166cm) x
32.6”(83cm) ,484.0Ibs (220kg)